Here, we report the selective F8BT integration into 3D sil- icon microstructures featuring two-dimensional arrays of holes with different sizes, periods, and aspect ratios (ARs, defined as the depth-to-width ratio of the microfabricated holes), and use this to demonstrate a straightforward fabrication procedure of two-dimensional arrays of photoluminescent light-sources with characteristic sizes and periods ranging from a few microm- eters up to tens of micrometers. Fabrication of a large variety of hybrid polymer/silicon microstructured optical devices with a plethora of applications ranging from photonics to medicine can be envisaged by building on these results.
Two-Dimensional Array of Photoluminescent Light Sources by Selective Integration of Conjugated Luminescent Polymers into Three-Dimensional Silicon Microstructures
POLITO, GIOVANNI;SURDO, SALVATORE;ROBBIANO, VALENTINA;BARILLARO, GIUSEPPE
2013-01-01
Abstract
Here, we report the selective F8BT integration into 3D sil- icon microstructures featuring two-dimensional arrays of holes with different sizes, periods, and aspect ratios (ARs, defined as the depth-to-width ratio of the microfabricated holes), and use this to demonstrate a straightforward fabrication procedure of two-dimensional arrays of photoluminescent light-sources with characteristic sizes and periods ranging from a few microm- eters up to tens of micrometers. Fabrication of a large variety of hybrid polymer/silicon microstructured optical devices with a plethora of applications ranging from photonics to medicine can be envisaged by building on these results.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.