In the design of the Silicon Vertex Tracker for the high luminosity SuperB collider, very challenging requirements are set by physics and background conditions on its innermost Layer0: small radius (about 1.5 cm), resolution of 10-15 mu m in both coordinates, low material budget < 1%X-0, and the ability to withstand a background hit rate of several tens of MHz/cm(2). Thanks to an intense R&D program the development of Deep NWell CMOS MAPS (with the ST Microelectronics 130 nm process) has reached a good level of maturity and allowed for the first time the implementation of thin CMOS sensors with similar functionalities as in hybrid pixels, such as pixel-level sparsification and fast time stamping. Further MAPS performance improvements are currently under investigation with two different approaches: the INMAPS CMOS process, featuring a quadruple well and a high resistivity substrate, and 3D CMOS MAPS, realized with vertical integration technology. In both cases specific features of the processes chosen can improve charge collection efficiency, with respect to a standard DNW MAPS design, and allow to implement a more complex in-pixel logic in order to develop a faster readout architecture. Prototypes of MAPS matrix, suitable for application in the SuperB Layer0, have been realized with the INMAPS 180 nm process and the 130 nm Chartered/Tezzaron 3D process and results of their characterization will be presented in this paper. (C) 2012 Elsevier B.V. All rights reserved.
|Autori interni:||RIZZO, GIULIANA|
|Autori:||G. Rizzo;D. Comott;M. Manghisoni;V. Re;G. Traversi;L. Fabbri;A. Gabrielli;F. Giorgi;G. Pellegrini;C. Sbarra;N. Semprini-Cesari;S. Valentinetti;M. Villa;A. Zoccoli;A. Berra;D. Lietti;M. Prest;A. Bevan;F. Wilson;G. Beck;J. Morris;F. Gannaway;R. Cenci;L. Bombelli;M. Citterio;S. Coelli;C. Fiorini;V. Liberali;M. Monti;B. Nasri;N. Neri;F. Palombo;A. Stabile;G. Balestri;G. Batignani;A. Bernardelli;S. Bettarini;F. Bosi;G. Casarosa;M. Ceccanti;F. Forti;M. A. Giorgi;A. Lusiani;P. Mammini;F. Morsani;B. Oberhof;E. Paoloni;A. Perez;G. Petragnani;A. Profeti;A. Soldani;J. Walsh;M. Chrzaszcz;L. Gaioni;A. Manazza;E. Quartieri;L. Ratti;S. Zucca;G. Alampi;G. Cotto;D. Gamba;S. Zambito;G. F. Dalla;G. Fontana;L. Pancheri;M. Povoli;G. Verzellesi;M. Bomben;L. Bosisio;P. Cristaudo;L. Lanceri;B. Liberti;I. Rashevskaya;C. Stella;L. Vitale|
|Titolo:||Recent developments on CMOS MAPS for the SuperB Silicon Vertex Tracker|
|Anno del prodotto:||2013|
|Digital Object Identifier (DOI):||10.1016/j.nima.2012.10.084|
|Appare nelle tipologie:||1.1 Articolo in rivista|