Electrochemical micromachining (ECM) is a highly flexible technology allowing for accurate fabrication of both simple microstructures (e.g. macropores, microtips, spirals) and complex microsystems (e.g. microgrippers, microneedles) in silicon, at low cost in any lab. In this paper main advantages and drawbacks of ECM technology are discussed, also with respect to standard leading micromachining technology, and future directions for ECM advance are given.

Silicon Electrochemical Micromachining Technology: The good, the bad, and the future

BARILLARO, GIUSEPPE
2015-01-01

Abstract

Electrochemical micromachining (ECM) is a highly flexible technology allowing for accurate fabrication of both simple microstructures (e.g. macropores, microtips, spirals) and complex microsystems (e.g. microgrippers, microneedles) in silicon, at low cost in any lab. In this paper main advantages and drawbacks of ECM technology are discussed, also with respect to standard leading micromachining technology, and future directions for ECM advance are given.
2015
Barillaro, Giuseppe
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/817924
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? ND
social impact