Electrochemical micromachining (ECM) is a highly flexible technology allowing for accurate fabrication of both simple microstructures (e.g. macropores, microtips, spirals) and complex microsystems (e.g. microgrippers, microneedles) in silicon, at low cost in any lab. In this paper main advantages and drawbacks of ECM technology are discussed, also with respect to standard leading micromachining technology, and future directions for ECM advance are given.
Silicon Electrochemical Micromachining Technology: The good, the bad, and the future
BARILLARO, GIUSEPPE
2015-01-01
Abstract
Electrochemical micromachining (ECM) is a highly flexible technology allowing for accurate fabrication of both simple microstructures (e.g. macropores, microtips, spirals) and complex microsystems (e.g. microgrippers, microneedles) in silicon, at low cost in any lab. In this paper main advantages and drawbacks of ECM technology are discussed, also with respect to standard leading micromachining technology, and future directions for ECM advance are given.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.