A micro-Pirani vacuum sensor with an operating pressure range of more than 5 decades is described. The device is fabricated by applying a low-resolution and potentially low-cost front-side bulk micromachining step to a chip produced with a commercial CMOS technology. Maximization of the thermally coupled surfaces has been obtained by stacking all layers available by default in the CMOS process. This design choice and the integration of a low-noise, low-power readout interface allowed achievement of state-of-art performances with a fabrication approach affordable even to SMEs and small University laboratories.
Titolo: | A Compact CMOS Compatible micro-Pirani Vacuum Sensor with Wide Operating Range and Low Power Consumption |
Autori interni: | |
Anno del prodotto: | 2016 |
Rivista: | |
Handle: | http://hdl.handle.net/11568/844995 |
Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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BruschiP_844995.pdf | Versione finale editoriale | ![]() | Open AccessVisualizza/Apri |
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