The high-temperature microfluidic lithography was studied. A simple approach to improve the performance of microfluidic lithography, which does not act on the increase in the difference between the pressure that drives the capillary motion, but on the temperature-controlled reduction of the polymer viscosity was presented. It was shown that high-temperature micro-molding in capillaries (MIMIC) is very flexible and straightforward method to improve the throughput of lithography.
High-temperature microfluidic lithography
PISIGNANO, DARIO
2002-01-01
Abstract
The high-temperature microfluidic lithography was studied. A simple approach to improve the performance of microfluidic lithography, which does not act on the increase in the difference between the pressure that drives the capillary motion, but on the temperature-controlled reduction of the polymer viscosity was presented. It was shown that high-temperature micro-molding in capillaries (MIMIC) is very flexible and straightforward method to improve the throughput of lithography.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
