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EnglishA simple, very low cost pattern generator for electron-beam lithography is presented. When it is applied to a scanning electron microscope, the system allows a high precision positioning of the beam for lithography of very small structures. Patterns are generated by a suitable software implemented on a personal computer, by using very simple functions, allowing an easy development of new writing strategies for a great adaptability to different user necessities. Hardware solutions, as optocouplers and battery supply, have been implemented for reduction of noise and disturbs on the voltages controlling the positioning of the beam. (C) 2003 American Institute of Physics.
| Autori interni: | |
| Autori: | Pennelli G; D' Angelo F; Piotto M; Barillaro G; Pellegrini B |
| Titolo: | A low cost high resolution pattern generator for electron-beam lithography |
| Anno del prodotto: | 2003 |
| Abstract: | A simple, very low cost pattern generator for electron-beam lithography is presented. When it is applied to a scanning electron microscope, the system allows a high precision positioning of the beam for lithography of very small structures. Patterns are generated by a suitable software implemented on a personal computer, by using very simple functions, allowing an easy development of new writing strategies for a great adaptability to different user necessities. Hardware solutions, as optocouplers and battery supply, have been implemented for reduction of noise and disturbs on the voltages controlling the positioning of the beam. (C) 2003 American Institute of Physics. |
| Digital Object Identifier (DOI): | 10.1063/1.1583861 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
http://hdl.handle.net/11568/887880
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