Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described.
Precise measurement of gas volumes by means of low-offset MEMS flow sensors with µL/min resolution
Piotto, Massimo;Del Cesta, Simone;Bruschi, Paolo
2017-01-01
Abstract
Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described.File | Dimensione | Formato | |
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