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Titolo Data di pubblicazione Autore(i) File
Determination of porous silicon growth profiles in the presence of non-uniform doping by means of a switching current method 1-gen-2003 Barillaro, Giuseppe; Bruschi, Paolo; Diligenti, Alessandro; Navarrini, D.
A thick silicon dioxide fabrication process based on electrochemical trenching of silicon 1-gen-2003 Barillaro, Giuseppe; Diligenti, Alessandro; Nannini, Andrea; Pennelli, Giovanni
A split heater integrated gas flow sensor for ultra low flow regimes 1-gen-2004 Bruschi, Paolo; Diligenti, Alessandro; Navarrini, D; Piotto, Massimo
Detecting NO2 with APSFET, an adsorption porous silicon FET 1-gen-2004 Barillaro, Giuseppe; Diligenti, Alessandro; Nannini, Andrea; Strambini, LUCANOS MARSILIO; Comini, E; Sberveglieri, G.
Micromachining by electrochemical silicon etching: technology and applications 1-gen-2004 G., Barillaro; P., Bruschi; Diligenti, Alessandro; Nannini, Andrea
A double Heater integrated gas flow sensor with thermal feedback 1-gen-2005 Bruschi, Paolo; Diligenti, Alessandro; Navarrini, D; Piotto, Massimo
FET-like silicon sensor with a porous layer for NO2 detection 1-gen-2005 Barillaro, Giuseppe; Diligenti, Alessandro; Strambini, LUCANOS MARSILIO; Comini, E; Faglia, G.
A silicon crystalline resistor with an adsorbing porous layer as gas sensor 1-gen-2005 Barillaro, Giuseppe; Diligenti, Alessandro; G., Marola; Strambini, LUCANOS MARSILIO
Gas sensors based on silicon devices with a porous layer 1-gen-2005 Barillaro, Giuseppe; Diligenti, Alessandro; Nannini, Andrea; Strambini, LUCANOS MARSILIO
Fabrication of regular silicon microstructures by photo-electrochemical etching of silicon 1-gen-2005 Barillaro, Giuseppe; Bruschi, Paolo; Diligenti, Alessandro; Nannini, Andrea
High aspect ratio silicon dioxide microneedles array fabrication 1-gen-2005 Barillaro, Giuseppe; Diligenti, Alessandro; Pieri, Francesco; Pennelli, Giovanni
Silicon micromachined periodic structures for optical applications at λ=1.55 µm 1-gen-2006 Barillaro, Giuseppe; Diligenti, Alessandro; Benedetti, M; Merlo, S.
Low-concentration NO2 detection with an adsorption porous silicon FET 1-gen-2006 Barillaro, Giuseppe; Nannini, Andrea; Diligenti, Alessandro; Strambini, LUCANOS MARSILIO; E., Comini; G., Sberveglieri
Process for manufacturing microelectromechanical interaction systems for storage medium 1-gen-2006 Barillaro, Giuseppe; Diligenti, Alessandro; C., Riva; R., Campedelli; S., Losa
Silicon micromachined periodic structures for optical applications at l=1.55 micron 1-gen-2007 Barillaro, G; Diligenti, Alessandro; Benedetti, M; Merlo, S.
P+-n diodes with a lateral porous layer as gas sensors 1-gen-2007 Barillaro, Giuseppe; Diligenti, Alessandro; Strambini, LUCANOS MARSILIO
Process for manufacturing a microelectromechanical interaction system for a storage medium 1-gen-2007 Barillaro, Giuseppe; Diligenti, Alessandro; Riva, Caterina; Campedelli, Roberto; Losa, Stefano
Silicon dioxide microneedles for transdermal drug delivery 1-gen-2008 Barillaro, Giuseppe; Diligenti, Alessandro; Strambini, LUCANOS MARSILIO
A STUDY ON THE PATTERN DEPENDENCE OF ELECTROCHEMICALLY ETCHED STRUCTURES ON N-TYPE SUBSTRATES 1-gen-2008 Barillaro, Giuseppe; Diligenti, Alessandro; Strambini, LUCANOS MARSILIO
CURRENT TRANSPORT IN FREE-STANDING POROUS SILICON MEMBRANES 1-gen-2008 N., Bacci; Barillaro, Giuseppe; Diligenti, Alessandro
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