This paper presents the design of a monocular three dimensional artificial vision system attached to a 20× microscope lens for precision and microsystems applications. Possible uses in assembly include: positioner calibration, sensor-based part handling, positioning, and inspection in the nanometric range. The developed image acquisition method – along one direction (in steps of 100 nm), the depth-from-focus algorithm and subpixel interpolation (of 5 acquisitions for concurrent localization and inspection), allow to overcome the physical optics limitation achieving a resolution under 200 nm. The vision strategy and algorithms, described in the paper, have been validated by handling an AFM probe array by a micropositioner.

Integrated visual nanometric three dimensional positioning and inspection in the automated assembly of AFM probe arrays

LANZETTA, MICHELE;
2010-01-01

Abstract

This paper presents the design of a monocular three dimensional artificial vision system attached to a 20× microscope lens for precision and microsystems applications. Possible uses in assembly include: positioner calibration, sensor-based part handling, positioning, and inspection in the nanometric range. The developed image acquisition method – along one direction (in steps of 100 nm), the depth-from-focus algorithm and subpixel interpolation (of 5 acquisitions for concurrent localization and inspection), allow to overcome the physical optics limitation achieving a resolution under 200 nm. The vision strategy and algorithms, described in the paper, have been validated by handling an AFM probe array by a micropositioner.
2010
Lanzetta, Michele; CULPEPPER MARTIN, L.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11568/136293
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