Monte Carlo simulation of polycrystalline metal stripes under electromigration stress have been performed in order to obtain statistic information on failure modes. Several factors which can influence the phenomenon have been investigated, including stress current magnitude, line width and grain size. The resulting statistics exhibited a good agreement with the experimental data available in the literature, both on aluminum and more recent copper damascene lines.
Simulation of failure time distributions of metal lines under electromigration
DI PASCOLI, STEFANO;IANNACCONE, GIUSEPPE
2002-01-01
Abstract
Monte Carlo simulation of polycrystalline metal stripes under electromigration stress have been performed in order to obtain statistic information on failure modes. Several factors which can influence the phenomenon have been investigated, including stress current magnitude, line width and grain size. The resulting statistics exhibited a good agreement with the experimental data available in the literature, both on aluminum and more recent copper damascene lines.File in questo prodotto:
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