In the past few years we have developed a technological process allowing for the fabrication of radiation detectors with integrated electronics on high-resistivity silicon substrates. We report on some recent results relevant to the process optimisation and to device/circuit characterization. (C) 2003 Elsevier B.V. All rights reserved.
Recent results from the development of silicon detectors with integrated electronics
BATIGNANI, GIOVANNI;BETTARINI, STEFANO;BISOGNI, MARIA GIUSEPPINA;CARPINELLI, MASSIMO;FORTI, FRANCESCO;GIORGI, MARCELLO;RAMA, MATTEO;ROSSO, VALERIA;
2004-01-01
Abstract
In the past few years we have developed a technological process allowing for the fabrication of radiation detectors with integrated electronics on high-resistivity silicon substrates. We report on some recent results relevant to the process optimisation and to device/circuit characterization. (C) 2003 Elsevier B.V. All rights reserved.File in questo prodotto:
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