We investigate variability of a 32 nm flash memory cell and of 32 nm MOSFETs with a methodology based on sensitivity analysis performed with a limited number of TCAD simulations. We show that – as far as the standard deviation of the threshold voltage is concerned – our method provides results in very good agreement with those from three-dimensional atomistic statistical simulations, with a computational burden that is orders of magnitude smaller. We show that the proposed approach is a powerful tool to understand the role of the main variability sources and to explore the device design parameter space.
Sensitivity-based investigation of threshold voltage variability in 32-nm flash memory cells and MOSFETs
IANNACCONE, GIUSEPPE
2013-01-01
Abstract
We investigate variability of a 32 nm flash memory cell and of 32 nm MOSFETs with a methodology based on sensitivity analysis performed with a limited number of TCAD simulations. We show that – as far as the standard deviation of the threshold voltage is concerned – our method provides results in very good agreement with those from three-dimensional atomistic statistical simulations, with a computational burden that is orders of magnitude smaller. We show that the proposed approach is a powerful tool to understand the role of the main variability sources and to explore the device design parameter space.File in questo prodotto:
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