We fabricate and characterize a microscale silicon opto-electro-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental omega(m)/2 pi - 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.

Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity

TREDICUCCI, ALESSANDRO;
2015

Abstract

We fabricate and characterize a microscale silicon opto-electro-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental omega(m)/2 pi - 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.
Pitanti, Alessandro; Fink, Johannes M.; Safavi Naeini, Amir H.; Hill, Jeff T.; Lei, Chan U.; Tredicucci, Alessandro; Painter, Oskar
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11568/750806
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