High-power thermoelectric generators based on nanostructured silicon

The low thermal conductivity of silicon nanowires and nanostructures opens interesting opportunities for energy harvesting through the direct, high-efficiency, conversion of waste heat into electrical power. We present solutions for the fabrication and interconnection of a high number of suspended silicon nanostructures, within CMOS compatible top-down processes. Mechanical stability and thermoelectric properties of these devices will be analysed by means of finite element simulations, and opportunities for practical applications will be discussed. It will be shown that, despite the reduced dimensions needed for a strong suppression of thermal conductivity, a considerable amount of electrical power can be delivered to the load as a result of the presence of many interconnected devices on the same chip.